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21篇 您的检索式:作者名="Yangyang Ding"
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1Regeneration performance and carbon consumption of semi-coke and activated coke for SO_2 and NO removal显示文摘To decrease the operating cost of flue gas purification technologies based on carbon-based materials, the adsorption and regeneration performance of low-price semi-coke and activated coke were compared for SO2 and NO removal in a simulated flue gas. The functional groups of the two adsorbents before and after regeneration were characterized by a Fourier transform infrared(FTIR) spectrometer, and were quantitatively assessed using temperature programmed desorption(TPD) coupled with FTIR and acid–base titration. The results show that semi-coke had higher adsorption capacity(16.2% for SO2 and 38.6% for NO) than activated coke because of its higher content of basic functional groups and lactones. After regeneration, the adsorption performance of semi-coke decreased because the number of active functional groups decreased and the micropores increased. Semi-coke had better regeneration performance than activated coke. Semi-coke had a larger SO2 recovery of 7.2% and smaller carbon consumption of 12% compared to activated coke. The semi-coke carbon-based adsorbent could be regenerated at lower temperatures to depress the carbon consumption, because the SO2 recovery was only reduced a small amount.Song Ding Yuran Li Tingyu Zhu Yangyang Guo 2015Journal of Environmental Sciences2015,27,8:17
2Adsorption and desorption of SO_2, NO and chlorobenzene on activated carbon显示文摘Activated carbon(AC) is very effective for multi-pollutant removal; however, the complicated components in flue gas can influence each other's adsorption. A series of adsorption experiments for multicomponents, including SO_2, NO, chlorobenzene and H2 O,on AC were performed in a fixed-bed reactor. For single-component adsorption, the adsorption amount for chlorobenzene was larger than for SO_2 and NO on the AC. In the multi-component atmosphere, the adsorption amount decreased by 27.6% for chlorobenzene and decreased by 95.6% for NO, whereas it increased by a factor of two for SO_2,demonstrating that a complex atmosphere is unfavorable for chlorobenzene adsorption and inhibits NO adsorption. In contrast, it is very beneficial for SO_2 adsorption. The temperature-programmed desorption(TPD) results indicated that the binding strength between the gas adsorbates and the AC follows the order of SO_2> chlorobenzene > NO. The adsorption amount is independent of the binding strength. The presence of H2 O enhanced the component effects, while it weakened the binding force between the gas adsorbates and the AC. AC oxygen functional groups were analyzed using TPD and X-ray photoelectron spectroscopy(XPS) measurements. The results reveal the reason why the chlorobenzene adsorption is less affected by the presence of other components. Lactone groups partly transform into carbonyl and quinone groups after chlorobenzene desorption. The chlorobenzene adsorption increases the number of C = O groups, which explains the positive effect of chlorobenzene on SO_2 adsorption and the strong NO adsorption.Yuran Li Yangyang Guo Tingyu Zhu Song Ding 2016Journal of Environmental Sciences2016,28,5:8
3Synthesis and Characterization of Condensed Polynuclear Aromatic Resin Derived from Ethylene Tar显示文摘As a kind of low-cost and readily available industrial byproduct, ethylene tar (ET) was for the first time utilized for the preparation of heat-resistant condensed polynuclear aromatic resin (COPNAR). The basic properties of ET and the resulted COPNAR were characterized by FT-IR, 1H-NMR, TGA and elemental analysis. The test results showed that ET with high aromatic content (>50%) was suitable for the synthesis of COPNAR with superior heat resistance. The average molecular structure of ET was obtained by means of the improved Brown-Ladner method, and the reaction mechanism was considered as an acid-catalyzed positive ion-typed polymerization. Our findings have provided a new route to develop ET into technology-added heat-resistant resins.Wu Mingbo Shi Yangyang Li Shibin Wang Yuwei Tan Minghui Wang Ding Zheng Jingtang Tsubaki Noritatsu 2012China Petroleum Processing & Petrochemical Technology2012,14,4:7
4The diagnostic value of apolipoprotein E in malignant pleural effusion associated with non-small cell lung cancer显示文摘Yumin Wang Zengqiang Chen Jie Chen Jingye Pan Wenhui Zhang Qinshi Pan Hongyan Ding Xiaomei Lin Xiushu Wen Yangyang Li Qing H. Meng 2013Clinica Chimica Acta2013,,:1
5The diagnostic value of apolipoprotein E in malignant pleural effusion associated with non-small cell lung cancer显示文摘Yumin Wang Zengqiang Chen Jie Chen Jingye Pan Wenhui Zhang Qinshi Pan Hongyan Ding Xiaomei Lin Xiushu Wen Yangyang Li Qing H. Meng 2013Clinica Chimica Acta2013,,:1
6Recent advances in carbon-supported non-precious metal singleatom catalysts for energy conversion electrocatalysis显示文摘Non-precious metal single-atom catalysts(NPM-SACs)with unique electronic structures and coordination environments have gained much attention in electrocatalysis owing to their low cost,high atomic utilization,and high performance.NPM-SACs on carbon support(NPM-SACs/CS)are promising because of the carbon substrate with a large surface area,excellent electrical conductivity,and high chemical stability.This review provides an overview of recent developments in NPM-SACs/CS for the electrocatalytic field.First,the state-of-the-art synthesis methods and advanced characterization techniques of NPM-SACs/CS are discussed in detail.Then,the structural adjustment strategy of NPM-SACs/CS for optimizing electrocatalytic performance is introduced concisely.Furthermore,we provide a comprehensive summary of recent advances in developing NPM-SACs/CS for important electrochemical reactions,including carbon dioxide reduction reaction,hydrogen evolution reaction,oxygen evolution reaction,oxygen reduction reaction,and nitrogen reduction reaction.In the end,the existing challenges and future opportunities of NPM-SACs/CS in the electrocatalytic field are highlighted.Li-Xia Liu Yangyang Ding Linan Zhu Jin-Cheng Li Huitong Du Xiang Li Zhaoyuan Lyu Dan Du Fuqiang Liu Yuanyuan Wang Wenlei Zhu Yuehe Lin 2023National Science Open2023,2,2:1
7Design and experiment of vibration plate type camellia fruit picking machine显示文摘In order to solve the problem of high missed rate of camellia fruits and high damage rate of flower buds during vibratory picking,through the study on the biological characteristics of camellia tree,the crown of camellia tree was divided into upper and lower canopy at the maximum canopy diameter.A kind of vibration plate type camellia fruit picking machine was designed.The structure and working principle of the whole machine were described.Through the analysis of the factors of camellia fruit abscission,it is concluded that frequency,amplitude and working time are the main factors affecting the magnitude of inertia force.Through preliminary research and coupling simulation,the horizontal range of each factor is determined:operation time is 5 s,10 s,15 s,frequency is 3 Hz,5 Hz,7 Hz and amplitude is 50 mm,60 mm,70 mm.Orthogonal tests were carried out on the upper and lower canopies successively,and the comprehensive scoring method was used to analyze the orthogonal test results.The results showed that the optimal combination of working parameters for picking camellia in the upper canopy was A3B3C2,that is,the operation time was 15 s,the amplitude was 70 mm and the frequency was 5 Hz.Under this condition,the missed picking rate of camellia fruits was 8.21%and the rate of flower buds damage was 9.12%.The optimal combination of working parameters for picking camellia fruits in the lower canopy was A3B1C3,that is,the operation time was 15 s,the amplitude was 50 mm and the frequency was 7 Hz.Under this condition,the rate of missing picking of camellia fruits was 6.84%and the rate of flower buds damage was 6.92%.Delin Wu Da Ding Bowen Cui Shan Jiang Enlong Zhao Yangyang Liu Chengmao Cao 2022International Journal of Agricultural and Biological Engineering2022,15,4:1
8Investigation on mechanism of polymer filling in high-aspect-ratio trenches for through-silicon-via(TSV) application显示文摘Vacuum-assisted spin-coating is an effective polymer filling technology for sidewall insulating of through-silicon-via(TSV).This paper investigated the flow mechanism of the vacuum-assisted polymer filling process based on experiments and numerical simulation,and studied the effect of vacuum pressure,viscosity of polymer and aspect-ratio of trench on the filling performance.A 2D axisymmetric model,consisting of polymer partially filled into the trench and void at the bottom of trench,was developed for the computational fluid dynamics(CFD)simulation.The simulation results indicate that the vacuum-assisted polymer filling process goes through four stages,including bubble formation,bubble burst,air elimination and polymer re-filling.Moreover,the simulation results suggest that the pressure significantly affects the bubble formation and the polymer re-filling procedure,and the polymer viscosity and the trench aspect-ratio influence the duration of air elimination.DING YingTao YAN YangYang CHEN QianWen WANG ShiWei CHEN Xiu CHEN YueYang 2014Science China(Technological Sciences)2014,57,8:1
9Feedstocks,environmental effects and development suggestions for biodiesel in China显示文摘In the usage phase,diesel engines fuelled with diesel-biodiesel blends produced lower soot,HC and CO emissions.However,the environmental effects should include the greenhouse gas(GHG)emissions.GHG variations of biodiesel production from three generation feedstocks were analyzed based on the land use change(LUC).Adequate land use change could keep the biodiversity and did not cause the increase of GHG emissions.The choice for feedstocks of biodiesel in China was comprehensively analyzed based on the land use type,the precipitation and the oil contents and the cultivation conditions of plants.Then,the suggestions for biodiesel development in China were given.Results showed that China should thoroughly abandon the first generation feedstocks due to the lack of arable land.Jatropha curcas(J.curcas),Pistacia chinensis Bunge(P.chinensis),Comus wilsoniana(C.wilsoniana)and Xanthoceras sorbifolium Bunge(X.sorbifolium)were considered as the most promising feedstocks for biodiesel production.It is suggested to plant X.sorbifolium in sand lands in the north and northwest of China with less natural rainfall and the others in south and southwest of China.The concern for microalgae should be transmitted to engineering microalgae cultivated in wastewater.The microalgae biodiesel refinery should be developed together with wastewater proposal industry and coal fired power plants.Lastly,only natural gas-based or biomass-based methanol can be used for biodiesel production.Hao Chen Meijuan Ding Yuan Li Hongming Xu Yangyang Li Zhao Wei 2020Journal of Traffic and Transportation Engineering(English Edition)2020,7,6:1
10Dynamic Trajectory Planning of Autonomous Lane Change at Medium and Low Speeds Based on Elastic Soft Constraint of the Safety Domain显示文摘Most current research on the trajectory planning of the autonomous lane change focuses on high-speed scenarios and assumes that the states of the surrounding vehicles keep stable during the lane change.The methods based on geometric-curve are mostly used for trajectory planning.In this paper,considering the inevitable development of the autonomous driving,the surrounding vehicles are assumed to be driven by human drivers,while the ego vehicles are able to autonomously change lanes.Representative local lane-change scenarios are then designed and analyzed in detail aiming at medium-and low-speed lane-change conditions.Additionally,in contrast with most research,dynamic trajectory planning which considers the possible state variations of the surrounding vehicles and the driver characteristics is studied and described by a fifth-order polynomial function.The safety and comfort of the dynamic trajectory planning are validated through simulation.Moreover,the elastic soft constraint of the safety domain is designed,whereby the sensitivity of the studied dynamic trajectory planning system is reduced under the premise of ensuring safety.The effectiveness of the elastic soft constraint in terms of improving comfort during the lane change is verified through simulation.The availability of the dynamic trajectory planning system with the elastic soft constraint is demonstrated with the addition of trajectory tracking based on model predictive control,showing its potential in practical applications.Yangyang Wang Ding Pan Hangyun Deng Yuanxing Jiang Zhiguang Liu 2020Automotive Innovation2020,3,1:1
11Low capacitance and highly reliable blind through-silicon-vias(TSVs) with vacuum-assisted spin coating of polyimide dielectric liners显示文摘Low-k and high aspect ratio blind through-silicon-vias(TSVs) to be applied in 'via-last/backside via' 3-D integration paradigm were fabricated with polyimide dielectric liners formed by vacuum-assisted spin coating technique. MIS trench capacitors with diameter of ~6 μm and depth of ~54 μm were successfully fabricated with polyimide insulator step coverage better than 30%. C-V characteristics and leakage current properties of the MIS trench capacitor were evaluated under thermal treatment. Experimental results show that, the minimum capacitance density is around 4.82 n F/cm^2, and the leakage current density after 30 cycles of thermal chock tests becomes stable and it is around 30 n A/cm2 under bias voltage of 20 V. It also shows that, the polyimide dielectric liner is with an excellent capability in constraining copper ion diffusion and mobile charges even under test temperature as high as 125°C. Finite element analysis results show that TSVs with polyimide dielectric liner are with lower risks in Si O_2 interlayer dielectric(ILD) fracture and interfacial delamination along dielectric-silicon interface, thus, higher thermo-mechanical reliability can be expected.YAN YangYang XIONG Miao LIU Bin DING YingTao CHEN ZhiMing 2016Science China(Technological Sciences)2016,59,10:1
12Toad-headed Lizard Phrynocephalus forsythii(Squamata,Agamidae)as a Potential Ring Species Inferred from Population Genetic Differentiation显示文摘Speciation has never been directly observed in nature because it is a lengthy phenomenon.Although rare,ring species are an optimal natural example of speciation and can be identified through the assessment of the geographical conditions of their potential habitat.Phrynocephalus forsythii is endemic to the Tarim Basin,which compnses the Taklamakan Desert and surrounded by mountains on three sides.This study aimed to determine whether P.forsythii had a ring-species-like divergence pattern through the characterization of the genetic features of 17 populations covering the major distribution of this species.Species distribution modelling revealed that P.forsythii had a continuous circular distribution around the Tarim Basin.Gene flow was observed in most adjacent populations except for two terminal populations of the ring,which exhibit the highest differentiation.Genetic distance and geographic distance were significantly correlated,indicating that the observed differentiation resulted from genetic variation gradually accumulating during population dispersion.Although our results do not definitively indicate that P.forsythii is a ring species,our results indicate a ring-shaped diversification This phenomenon elucidates the potential mechanism underlying speciation in the presence of gene flow,providing insight into this evolutionary process.Yue Qi Li DING Yangyang ZHAO Chenkai NIU Xiaoning WANG Wei ZHAO 2020Asian Herpetological Research2020,11,4:1
13MOF-derived Zn-Co-Ni sulfides with hollow nanosword arrays for high-efficiency overall water and urea electrolysis显示文摘Water electrolysis is a promising technology to produce hydrogen but it was severely restricted by the slow oxygen evolution reaction(OER).Herein,we firstly reported an advanced electrocatalyst of MOF-derived hollow Zn-Co-Ni sulfides(ZnS@Co_(9)S_(8)@Ni_(3)S_(2)-1/2,abbreviated as ZCNS-1/2)nanosword arrays(NSAs)with remarkable hydrogen evolution reaction(HER),OER and corresponding water electrolysis performance.To reach a current density of 10 mA cm^(-2),the cell voltage of assembled ZCNS-1/2//ZCNS-1/2 for urea electrolysis(1.314 V)is 208 mV lower than that for water electrolysis(1.522 V)and stably catalyzed for over 15 h,substantially outperforming the most reported water and urea electrolysis electrocatalysts.Density functional theory calculations and experimental result clearly reveal that the properties of large electrochemical active surface area(ECSA)caused by hollow NSAs and fast charge transfer resulted from the Co_(9)S_(8)@Ni_(3)S_(2) heterostructure endow the ZCNS-1/2 electrode with an enhanced electrocatalytic performance.Xiaoqiang Du Yangyang Ding Xiaoshuang Zhang 2023Green Energy & Environment2023,8,3:0
14Seasonal variations in glacier velocity in the High Mountain Asia region during 2015–2020显示文摘Velocity is an important component of glacier dynamics and directly reflects the response of glaciers to climate change.As a result,an accurate determination of seasonal variation in glacier velocity is very important in understanding the annual variation in glacier dynamics.However,few studies of glacier velocity in the High Mountain Asia(HMA)region were done.Along these lines,in this work,based on Sentinel-1 glacier velocity data,the distribution of glacier velocity in the HMA region was plotted and their seasonal variations during 2015-2020 were systematically analysed.The average glacier velocity in the HMA region was 0.053 m/d,and was positively correlated with the glacier area and slope.Glaciers in the Karakoram Mountains had the fastest average flow velocity(0.060 m/d),where the glaciers exhibited the largest average area and average slope.Moreover,glaciers in the GangdisêMountains had the slowest velocity(0.022 m/d)and the smallest average glacier area.The glacier flows were the fastest in spring(0.058 m/d),followed by summer(0.050 m/d),autumn(0.041 m/d),and winter(0.040 m/d).In addition,the glacier flows were the maximum in May,being 1.4 times of the annual average velocity.In some areas,such as the Qilian,Altun,Tibetan Interior,Eastern Kunlun,and Western Kunlun mountains,the peak glacier velocities appeared in June and July.The glacier velocity in the HMA region decreased in midsummer and reached the minimum in December when it was 75%of the annual average.These results highlight the role of meltwater in the seasonal variation in glacier flows in late spring and early summer.The seasonal velocity variation of lake-terminating glaciers was similar to that of land-terminating ones,but the former flowed faster.The velocity difference close to the mass balance line between the lake-and land-terminating glaciers was obviously greater in spring than in other seasons.In summer,the difference between the lake-and land-terminating glaciers at a normalized distance of 0.05-0.40 from the terminus was significantly greater than those of other seasons.The velocity difference between the lake-and land-terminating glaciers is closely related to the variable of ice thickness,and also to the frictional force of the terminal base reduced by proglacial lakes.Thus,it can be concluded that in addition to the variation of the glacier thickness and viscosity,the variation of glacier water input also plays a key role in the seasonal variation of glacier velocity.ZHANG Zhen XU Yangyang LIU Shiyin DING Jing ZHAO Jinbiao 2023Journal of Arid Land2023,15,6:0
15A Quantum Tanimoto Coefficient Fidelity for Entanglement Measurement显示文摘Fidelity plays an important role in quantum information processing,which provides a basic scale for comparing two quantum states.At present,one of the most commonly used fidelities is Uhlmann-Jozsa(U-J)fidelity.However,U-J fidelity needs to calculate the square root of the matrix,which is not trivial in the case of large or infinite density matrices.Moreover,U-J fidelity is a measure of overlap,which has limitations in some cases and cannot reflect the similarity between quantum states well.Therefore,a novel quantum fidelity measure called quantum Tanimoto coefficient(QTC)fidelity is proposed in this paper.Unlike other existing fidelities,QTC fidelity not only considers the overlap between quantum states,but also takes into account the separation between quantum states for the first time,which leads to a better performance of measure.Specifically,we discuss the properties of the proposed QTC fidelity.QTC fidelity is compared with some existing fidelities through specific examples,which reflects the effectiveness and advantages of QTC fidelity.In addition,based on the QTC fidelity,three discrimination coefficients d_(1)^(QTC),d_(2)^(QTC),and d_^(3)^(QTC)are defined to measure the difference between quantum states.It is proved that the discrimination coefficient d_(3)^(QTC)is a true metric.Finally,we apply the proposed QTC fidelity-based discrimination coefficients to measure the entanglement of quantum states to show their practicability.Yangyang Zhao Fuyuan Xiao Masayoshi Aritsugi Weiping Ding 2023IEEE/CAA Journal of Automatica Sinica2023,10,2:0
16Attacks Against Cross-Chain Systems and Defense Approaches:A Contemporary Survey显示文摘The blockchain cross-chain is a significant technology for inter-chain interconnection and value transfer among different blockchain networks.Cross-chain overcomes the“information island”problem of the closed blockchain network and is increasingly applied to multiple critical areas such as finance and the internet of things(IoT).Blockchain can be divided into three main categories of blockchain networks:public blockchains,private blockchains,and consortium blockchains.However,there are differences in block structures,consensus mechanisms,and complex working mechanisms among heterogeneous blockchains.The fragility of the cross-chain system itself makes the cross-chain system face some potential security and privacy threats.This paper discusses security defects on the cross-chain implementation mechanism,and discusses the impact of the structural features of blockchain networks on cross-chain security.In terms of cross-chain intercommunication,a cross-chain attack can be divided into a multi-chain combination attack,native chain attack,and inter-chain attack diffusion.Then various security threats and attack paths faced by the cross-chain system are analyzed.At last,the corresponding security defense methods of cross-chain security threats and future research directions for cross-chain applications are put forward.Li Duan Yangyang Sun Wei Ni Weiping Ding Jiqiang Liu Wei Wang 2023IEEE/CAA Journal of Automatica Sinica2023,10,8:0
17Effective CRISPR/Cas9-based genome editing in large yellow croaker (Larimichthys crocea)显示文摘The large yellow croaker (Larimichthys crocea) is an economically important marine species with the highest annual production among the farmed marine fishes in China. However, the aquaculture industry of this species is suffering from severe problems that include weakened disease resistance, decreased growth rate, and reduced meat quality due to frequent inbreeding. Genome editing, which has a huge potential for solving those problems by introducing favorable genetic changes, is not yet available for the large yellow croaker. Here, we pioneered the techniques of embryo microinjection and genome editing using the CRISPR/Cas9 system in this species. Recombinant plasmids encoding green fluorescent protein (GFP) were introduced into the fertilized eggs of L. crocea by microinjection before the chorion had hardened. A high survival rate (40%) and GFP-positive larvae rate (81.8%) were achieved, indicating that the microinjection technique in L. crocea was successfully established. On this basis, Cas9 mRNA and sgRNA targeting the tyrosinase a gene in L. crocea (Lc-tyra) were co-injected into fertilized eggs of L. crocea. Mutant individuals with insertion and deletion mutations of Lc-tyra were detected. These results indicated that the CRISPR/Cas9-based genome editing technology established herein could efficiently introduce mutations at a specific site in the L. crocea genome. This method provides the potential for genetic improvement and functional genomic study in this species. This is the first report on effective CRISPR/Cas9-based genome editing in L. crocea.Qiuhua Li Guangming Shao Yangyang Ding Libing Xu Jianchun Shao Jingqun Ao Xinhua Chen 2023Aquaculture and Fisheries2023,8,1:0
18Unhealthy Eating Behaviors During Pregnancy and Gestational Weight Gain—Huai’an City,Jiangsu Province,China,2020–2021显示文摘Summary What is already known about this topic?Maintaining a healthy diet and appropriate weight during pregnancy is crucial for both the expectant mother and the fetus.Unhealthy eating behaviors(UEBs)such as eating out frequently are becoming increasingly prevalent across the globe.However,there is a dearth of research investigating the relationship between UEBs and gestational weight gain(GWG)specifically in the context of Chinese women.Zifan Zhang Weijie Ding Hui Wang Yangyang Cheng Yue Zhang Xiaoqin Zhu Xiaolin Xu 2023China CDC weekly2023,5,35:0
19Interfacial engineering of atomic platinum-doped molybdenum carbide quantum dots for high-rate and stable hydrogen evolution reaction in proton exchange membrane water electrolysis显示文摘Platinum(Pt)-based electrocatalysts remain the only practical cathode catalysts for proton exchange membrane water electrolysis(PEMWE),due to their excellent catalytic activity for acidic hydrogen evolution reaction(HER),but are greatly limited by their low reserves and high cost.Here,we report an interfacial engineering strategy to obtain a promising low-Pt loading catalyst with atomically Pt-doped molybdenum carbide quantum dots decorated on conductive porous carbon(Pt-MoCx@C)for high-rate and stable HER in PEMWE.Benefiting from the strong interfacial interaction between Pt atoms and the ultra-small MoCx quantum dots substrate,the Pt-MoCx catalyst exhibits a high mass activity of 8.00 A·mgPt−1,5.6 times higher than that of commercial 20 wt.%Pt/C catalyst.Moreover,the strong interfacial coupling of Pt and MoCx substrate greatly improves the HER stability of the Pt-MoCx catalyst.Density functional theory studies further confirm the strong metal-support interaction on Pt-MoCx,the critical role of MoCx substrate in the stabilization of surface Pt atoms,as well as activation of MoCx substrate by Pt atoms for improving HER durability and activity.The optimized Pt-MoCx@C catalyst demonstrates>2000 h stability under a water-splitting current of 1000 mA·cm^(−2)when applied to the cathode of a PEM water electrolyzer,suggesting the potential for practical applications.Lulu Chen Yichao Huang Yanping Ding Ping Yu Fang Huang Wenbo Zhou Limin Wang Yangyang Jiang Haitao Li Hanqing Cai Lin Wang Hang Wang Meihong Liao Lianming Zhao Zhuangjun Fan 2023Nano Research2023,16,10:0
20A robust lateral shift free(LSF)electrothermal micromirror with flexible multimorph beams显示文摘Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide(SiO_(2))as the electrothermal isolation material.However,due to the brittle nature of SiO_(2),such micromirrors may be incapable to survive even slight collisions,which greatly limits their application range.To improve the robustness of electrothermal micromirrors,a polymer material is incorporated and partially replaces SiO_(2) as the electrothermal isolation and anchor material.In particular,photosensitive polyimide(PSPI)is used,which also simplifies the fabrication process.Here,PSPIbased electrothermal micromirrors have been designed,fabricated,and tested.The PSPI-type micromirrors achieved an optical scan angle of±19.6°and a vertical displacement of 370μm at only 4 Vdc.With a mirror aperture size of 1 mm×1 mm,the PSPI-type micromirrors survived over 200 g accelerations from either vertical or lateral directions in impact experiments.In the drop test,the PSPI-type micromirrors survived falls to a hard floor from heights up to 21 cm.In the standard frequency sweeping vibration test,the PSPI-type micromirrors survived 21 g and 29 g acceleration in the vertical and lateral vibrations,respectively.In all these tests,the PSPI-type micromirrors demonstrated at least 4 times better robustness than SiO_(2)-type micromirrors fabricated in the same batch.Hengzhang Yang Anrun Ren Yingtao Ding Lei Xiao Teng Pan Yangyang Yan Wenlong Jiao Huikai Xie 2023Microsystems & Nanoengineering2023,9,4:0
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