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| 1 | Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays显示文摘Nanoscale lithographic technologies have been intensively studied for the development of the next generation of semiconductor manufacturing practices.While mask-less/direct-write electron beam(EB)lithography methods serve as a candidate for the upcoming 10-nm node approaches and beyond,it remains difficult to achieve an appropriate level of throughput.Several innovative features of the multiple EB system that involve the use of a thermionic source have been proposed.However,a blanking array mechanism is required for the individual control of multiple beamlets whereby each beamlet is deflected onto a blanking object or passed through an array.This paper reviews the recent developments of our application studies on the development of a high-speed massively parallel electron beam direct write(MPEBDW)lithography.The emitter array used in our study includes nanocrystalline-Si(nc-Si)ballistic electron emitters.Electrons are drifted via multiple tunnelling cascade transport and are emitted as hot electrons.The transport mechanism allows one to quickly turn electron beamlets on or off.The emitter array is a micro-electro-mechanical system(MEMS)that is hetero-integrated with a separately fabricated active-matrix-driving complementary metal-oxide semiconductor(CMOS)large-scale integration(LSI)system that controls each emitter individually.The basic function of the LSI was confirmed to receive external writing bitmap data and generate driving signals for turning beamlets on or off.Each emitted beamlet(10×10μm^(2))is converged to 10×10 nm^(2) on a target via the reduction electron optic system under development.This paper presents an overview of the system and characteristic evaluations of the nc-Si emitter array.We examine beamlets and their electron emission characteristics via a 1:1 exposure test. | Masayoshi Esashi Akira Kojima Naokatsu Ikegami Hiroshi Miyaguchi Nobuyoshi Koshida | 2015 | Microsystems & Nanoengineering2015，1，1： | 4 |
| 2 | Epstein–Barr virus-associated hemophagocytic syndrome in a patient with ulcerative colitis during treatment with azathioprine: A case report and review of literature显示文摘A 19-year-old female was diagnosed with ulcerative colitis when she presented with persistent melena, and has been treated with 5-aminosalicylic acid for 4 years,with additional azathioprine for 2 years at our hospital.The patient experienced high-grade fevers, chills, and cough five d prior to presenting to the outpatient unit.At first, the patient was suspected to have developed neutropenic fever; however, she was diagnosed with Epstein-Barr virus-associated hemophagocytic syndrome(EB-VAHS) upon fulfilling the diagnostic criteria after bone marrow aspiration. When patients withinflammatory bowel disease treated with immunomodulators, such as thiopurine preparations, develop fever, EB-VAHS should be considered in the differential diagnosis. | Kazuya Miyaguchi Minoru Yamaoka Yoshikazu Tsuzuki Keigo Ashitani Hideki Ohgo Yoshitaka Miyagawa Keisuke Ishizawa Hidekazu Kayano Hidetomo Nakamoto Hiroyuki Imaeda | 2018 | World Journal of Clinical Cases2018，6，14： | 3 |
| 3 | Purification and identification of a ACE inhibitory peptide from oyster proteins hydrolysate and the antihypertensive effect of hydrolysate in spontaneously hypertensive rats显示文摘 | Jiapei Wang Jianen Hu Jinzhe Cui Xuefang Bai Yuguang Du Yuji Miyaguchi Bingcheng Lin | 2008 | Food Chemistry2008，，2： | 2 |
| 4 | Isolation and characterization of angiotensin I-converting enzyme inhibitory peptides derived from porcine hemoglobin显示文摘 | YU Y HU J MIYAGUCHI Y | 2006 | Peptides2006，27，11： | 1 |
| 5 | Relationships between stretch-shortening cycle performance and maximum muscle strength显示文摘 | Miyaguchi K Demura S | 2008 | J Strength Cond Res2008，22，1： | 1 |
| 6 | 显示文摘 | Kuwayama K Tsujikawa K Miyaguchi H | 2009 | Journal of Analytical Toxicology2009，33，5： | 1 |
| 7 | Effect of tool stiffness upon tool wear in high spindle speed milling using small ball end mill 显示文摘 | Takashi Miyaguchi | 2001 | Journal of the International Societies for Precision Engineering and Nanotecbnology2001，25，2： | 1 |
| 8 | Optimal temperature of graft preservation after ex vivo gene transfer in lung isografts 显示文摘 | Osaragi T Nagahiro I Miyaguchi N | 2008 | Acta Med Okayama2008，62，5： | 1 |
| 9 | Isolation and characterization of angiotensin I converting enzyme inhibitory peptides derived from porcine hemoglobin显示文摘 | Yu Y Hu J Miyaguchi Y | 2006 | Peptides2006，27，11： | 1 |
| 10 | Maintenance of the Kanmon railway tunnels显示文摘 | Korehide Miyaguchi | 1986 | Tunneling and Underground Space Technology1986，1，34： | 1 |
| 11 | Isolation and characterization of angiotensin I-converting enzyme inhibitory peptides derived from porcine hemoglobin显示文摘 | Yu Y Hu JN Miyaguchi YJ | 2006 | Peptides2006，11，： | 1 |
| 12 | Time-course measurements of caffeine and its metabolites extracted from fingertips after coffee intake: a preliminary study for the detection of drugs from fingerprints显示文摘 | Kuwayama Kenji Tsujikawa Hajime Miyaguchi | 2013 | Anal Bioanal Chem2013，，405： | 1 |
| 13 | Identification of impurities and the statistical classification of methamphetamine using headspace solid phase microextraction and gas chromatography-mass spectrometry显示文摘 | Kuwayama K Tsujikawa K Miyaguchi H | 2006 | Forensic Sci Int2006，160，1： | 1 |
| 14 | Development of PZT sputtering method for mass-production显示文摘 | MASUD T MIYAGUCHI Y TANIMURA M | 2001 | Applied Surface Science2001，，： | 1 |
| 15 | Optically transparent wood-cellulose nanocomposites as a base substrate for flexible organic light-emitting diode displays 显示文摘 | Okahisa Y Yoshida A Miyaguchi S | 2009 | Composites Science and Technology2009，69，1112： | 1 |
| 16 | Some properties of succinglated globin显示文摘 | Miyaguchi Y Sakai K Yonekure M | 1989 | Nip-pon Shokuhin Kogoy Gakkaishi1989，36，： | 1 |
| 17 | Optically transparent wood-cellulose nanocomposite as a base substrate for flexible organic light-emitting diode displays显示文摘 | Okahisa Y Yoshida A Miyaguchi S | | 0，，11： | 1 |
| 18 | Identification of pathogenesis-related microRNAs in hepatocellular carcinoma by expression profiling显示文摘 | KATAYAMA Y MAEDA M MIYAGUCHI K | | 0，，04： | 1 |
| 19 | Development of HTF Series Ball Screws for High Load Drive Application显示文摘 | Maruyama D Miyaguchi K | 2002 | Motion Control2002，13，： | 1 |
| 20 | An evaluation method of radial accuracy for hydrostatic air spindles considering radial movement of the rotating center显示文摘 | Noguchi S Miyaguchi K | 2003 | Precision Engineering2003，27，： | 1 |
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