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| 1 | Review on mechanism and process of surface polishing using lasers显示文摘Laser polishing is a technology of smoothening the surface of various materials with highly intense laser beams. When these beams impact on the material surface to be polished, the surface starts to be melted due to the high temperature. The melted material is then relocated from the ‘peaks to valleys’ under the multidirectional action of surface tension. By varying the process parameters such as beam intensity, energy density, spot diameter, and feed rate, different rates of surface roughness can be achieved. High precision polishing of surfaces can be done using laser process. Currently, laser polishing has extended its applications from photonics to molds as well as bio-medical sectors. Conventional polishing techniques have many drawbacks such as less capability of polishing freeform surfaces, environmental pollution, long processing time, and health hazards for the operators. Laser polishing on the other hand eliminates all the mentioned drawbacks and comes as a promising technology that can be relied for smoothening of initial topography of the surfaces irrespective of the complexity of the surface. Majority of the researchers performed laser polishing on materials such as steel, titanium, and its alloys because of its low cost and reliability. This article gives a detailed overview of the laser polishing mechanism by explaining various process parameters briefly to get a better understanding about the entire polishing process. The advantages and applications are also explained clearly to have a good knowledge about the importance of laser polishing in the future. | Arun KRISHNAN Fengzhou FANG | 2019 | Frontiers of Mechanical Engineering2019，14，3： | 15 |
| 2 | Atomic and Close-to-Atomic Scale Manufacturing:A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy显示文摘Manufacturing at the atomic scale is the next generation of the industrial revolution.Atomic and close-to-atomic scalemanufacturing(ACSM)helps to achieve this.Atomic force microscopy(AFM)is a promising method for this purposesince an instrument to machine at this small scale has not yet been developed.As the need for increasing the number ofelectronic components inside an integrated circuit chip is emerging in the present-day scenario,methods should be adoptedto reduce the size of connections inside the chip.This can be achieved using molecules.However,connecting moleculeswith the electrodes and then to the external world is challenging.Foundations must be laid to make this possible for thefuture.Atomic layer removal,down to one atom,can be employed for this purpose.Presently,theoretical works are beingperformed extensively to study the interactions happening at the molecule-electrode junction,and how electronic transportis affected by the functionality and robustness of the system.These theoretical studies can be verified experimentally only if nano electrodes are fabricated.Silicon is widely used in the semiconductor industry to fabricate electronic components.Likewise,carbon-based materials such as highly oriented pyrolytic graphite,gold,and silicon carbide find applications inthe electronic device manufacturing sector.Hence,ACSM of these materials should be developed intensively.This paperpresents a review on the state-of-the-art research performed on material removal at the atomic scale by electrochemical andmechanical methods of the mentioned materials using AFM and provides a roadmap to achieve effective mass productionof these devices. | Paven Thomas Mathew Brian J.Rodriguez Fengzhou Fang | 2020 | Nanomanufacturing and Metrology2020，3，3： | 9 |
| 3 | Atomic and close-to-atomic scale manufacturing: perspectives and measures显示文摘This article presents the three paradigms of manufacturing advancement:Manufacturing I,craft-based manufacturing by hand,as in the Stone,Bronze,and Iron Ages,in which manufacturing precision was at the millimeter scale;ManufacturingⅡ,precision-controllable manufacturing using machinery whereby the scales of material removal,migration,and addition were reduced from millimeters to micrometers and even nanometers;and Manufacturing Ⅲ,manufacturing objectives and processes are directly focused on atoms,spanning the macro-through the micro-to the nanoscale,whereby manufacturing is based on removal,migration,and addition at the atomic scale,namely,atomic and close-to-atomic scale manufacturing(ACSM).A typical characteristic of ACSM is that energy directly impacts the atom to be removed,migrated,and added.ACSM,as the next generation of manufacturing technology,will be employed to build atomic-scale features for required functions and performance with the capacity of mass production.It will be the leading development trend in manufacturing technology and will play a significant role in the manufacturing of high-end components and future products. | Fengzhou Fang | 2020 | International Journal of Extreme Manufacturing2020，2，3： | 6 |
| 4 | Atomic and close-to-atomic scale manufacturing A trend inmanufacturing development显示文摘Manufacturing is the foundation of a nation'seconomy. It is the primary industry to promote economicand social development. To accelerate and upgrade China'smanufacturing sector from "precision manufacturing" to"high-performance and high-quality manufacturing", anew breakthrough should be found in terms of achieving a"leap-frog development". Unlike conventional manufac-turing, the fundamental theory of "Manufacturing 3.0" isbeyond the scope of conventional theory; rather, it is basedon new principles and theories at the atomic and/or close-to-atomic scale. Obtaining a dominant role at theinternational level is a strategic move for China's progress. | Fengzhou FANG | 2016 | Frontiers of Mechanical Engineering2016，11，4： | 6 |
| 5 | Recent Progress in Surface Integrity Research and Development显示文摘1.Introduction Surface integrity has great significance for the quality and performance of machined components,and has therefore been increasingly recognized by industry.In particular,within certain industries that require high reliability,such as the aerospace industry,surface integrity is one of the most relevant indexes used to evaluate the quality of machined parts.Thus,obtaining updated knowledge on surface integrity is of great interest to both the academic community and industry[1]. | Fengzhou Fang Chunyang Gu Ran Hao Kaiyuan You Siyu Huang | 2018 | Engineering2018，4，6： | 5 |
| 6 | MD simulation of nanometric cutting of copper with and without water lubrication显示文摘Three-dimensional molecular dynamics(MD)simulation was carried out to understand the mechanism of water lubrication in nanometric cutting.The water-lubricated cutting was compared with the dry cutting process in terms of lattice deformation,cutting force,heat and pressure distribution,and machined surface integrity.It was found that water molecules effectively reduce the friction between the tool and workpiece,the heat in the cutting zone and the pressure being generated on the tool surface,thus leading to prolonged tool life.Water molecules also enlarged the pressure-affected area,which decreased the roughness of the machined surface. | CHEN YunHui HAN Huang FANG FengZhou HU XiaoTang | 2014 | Science China(Technological Sciences)2014，57，6： | 5 |
| 7 | Tribological Performance of Bioimplants: A Comprehensive Review显示文摘Total joint replacements(TJR) have been a huge success for orthopaedic surgery in the past century and are gaining increasing importance today due to the aging population. However, the short longevity of artificial joints is one of the major problems in bioimplant industry and needs to be rectified since an increasing number of young people, with more active lifestyles, must receive TJR. Wear mechanisms are discussed in this paper to describe the root causes of the failures and to give some general ideas to increase the lifespan of artificial joints. The suitable material combination is of great importance for the wear resistance of bioimplants, and bioceramics will exert a crucial effect in their future progress. Other materials, such as metal alloys and polymers, are also discussed in this paper. Surface finish is another factor affecting the tribological performance of bioimplants. In recent years, surface texture technology has fascinated many researchers, and a good design of texture pattern requires a comprehensive understanding of wear mechanisms, material properties, and dynamic fluid theory. This review also covers a summary of in vitro wear tests, including simulators, lubricant, and testing parameters. | Gang Shen Fengzhou Fang Chengwei Kang | 2018 | Nanotechnology and Precision Engineering2018，1，2： | 4 |
| 8 | Study of nanoscratching of polymers by using molecular dynamics simulations显示文摘Molecular dynamic simulations are performed to study the nanoscratching behavior of polymers.The effects of scratching depth,scratching velocity and indenter/polymer interaction strength are investigated.It is found that polymer material in the scratching zone around the indenter can be removed in a ductile manner as the local temperature in the scratching zone exceeds glass transition temperature Tg.The recovery of polymer can be more significant when the temperature approaches or exceeds Tg.The tangential force,normal force and friction coefficient increase as the scratching depth increases.A larger scratching velocity leads to more material deformation and higher pile-up.The tangential force and normal force are larger for a larger scratching velocity whereas the friction coefficient is almost independent of the scratching velocities studied.It is also found that stronger indenter/polymer interaction strength results in a larger tangential force and friction coefficient. | YUAN DanDan ZHU PengZhe FANG FengZhou QIU Chen | 2013 | Science China(Physics,Mechanics & Astronomy)2013，56，9： | 4 |
| 9 | Development of surface reconstruction algorithms for optical interferometric measurement显示文摘Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications,but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy,speed,robustness,and dynamic range,especially in on-line or on-machine conditions.This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements.Principles,configurations,and applications of typical optical interferometers with different capabilities and limitations are presented.Theoretical background and recent advances of fringe analysis algorithms,including coherence peak sensing and phase-shifting algorithm,are summarized.The new developments in measurement accuracy and repeatability,noise resistance,self-calibration ability,and computational efficiency are discussed.This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement.To address these challenges,advanced techniques in image stitching,on-machine measurement,intelligent sampling,parallel computing,and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology. | Dongxu WU Fengzhou FANG | 2021 | Frontiers of Mechanical Engineering2021，16，1： | 2 |
| 10 | Characterisation of a microwave induced plasma torch for glass surface modification显示文摘Microwave induced plasma torches find wide applications in material and chemical analysis.Investigation of a coaxial electrode microwave induced plasma(CE–MIP)torch is conducted in this study,making it available for glass surface modification and polishing.A dedicated nozzle is designed to inject secondary gases into the main plasma jet.This study details the adaptation of a characterisation process for CE–MIP technology.Microwave spectrum analysis is used to create a polar plot of the microwave energy being emitted from the coaxial electrode,where the microwave energy couples with the gas to generate the plasma jet.Optical emission spectroscopy analysis is also employed to create spatial maps of the photonic intensity distribution within the plasma jet when different additional gases are injected into it.The CE–MIP torch is experimentally tested for surface energy modification on glass where it creates a super-hydrophilic surface. | Adam BENNETT Nan YU Fengzhou FANG Marco CASTELLI Guoda CHEN Alessio BALLERI Takuya URAYAMA | 2021 | Frontiers of Mechanical Engineering2021，16，1： | 2 |
| 11 | Towards atomic and close-to-atomic scale manufacturing显示文摘Human beings have witnessed unprecedented developments since the 1760s using precision tools and manufacturing methods that have led to ever-increasing precision,from millimeter to micrometer,to single nanometer,and to atomic levels.The modes of manufacturing have also advanced from craft-based manufacturing in the Stone,Bronze,and Iron Ages to precisioncontrollable manufacturing using automatic machinery.In the past 30 years,since the invention of the scanning tunneling microscope,humans have become capable of manipulating single atoms,laying the groundwork for the coming era of atomic and close-to-atomic scale manufacturing(ACSM).Close-to-atomic scale manufacturing includes all necessary steps to convert raw materials,components,or parts into products designed to meet the user’s specifications.The processes involved in ACSM are not only atomically precise but also remove,add,or transform work material at the atomic and close-to-atomic scales.This review discusses the history of the development of ACSM and the current state-of-the-art processes to achieve atomically precise and/or atomic-scale manufacturing.Existing and future applications of ACSM in quantum computing,molecular circuitry,and the life and material sciences are also described.To further develop ACSM,it is critical to understand the underlying mechanisms of atomic-scale and atomically precise manufacturing;develop functional devices,materials,and processes for ACSM;and promote high throughput manufacturing. | Fengzhou Fang Nan Zhang Dongming Guo Kornel Ehmann Benny Cheung Kui Liu Kazuya Yamamura | 2019 | International Journal of Extreme Manufacturing2019，1，1： | 2 |
| 12 | Germanium nanopyramid arrays showing near-100% absorption in the visible regime显示文摘Solar energy is regarded as one of the most plentiful sources of renewable energy. An extraordinary light-harvesting property of a germanium periodic nanopyramid array is reported in this Letter. Both our theoretical and experimental results demonstrate that the nanopyramid array can achieve perfect broadband absorption from 500- to 800-nm wavelength. Especially in the visible regime, the experimentally measured absorption can even reach 100%. Further analyses reveal that the intrinsic antireflection effect and slow-light waveguide mode play an important role in the ultra-high absorption, which is helpful for the research and development of photovoltaic devices. | Qi Han Yongqi Fu Lei Jin Jingjing Zhao Zongwei Xu Fengzhou Fang Jingsong Gao Weixing Yu | 2015 | Nano Research2015，8，7： | 2 |
| 13 | Anisotropy-Related Machining Characteristics in Ultra-Precision Diamond Cutting of Crystalline Copper显示文摘Deformation behavior at grain levels greatly affects the machining characteristics of crystalline materials.In the present work,we investigate the influence of material anisotropy on ultra-precision diamond cutting of single crystalline and polycrystalline copper by experiments and crystal plasticity finite element simulations.Specifically,diamond turning and in situ SEM orthogonal cutting experiments are carried out to provide direct experimental evidence of the material anisotropy-dependent cutting results in terms of machined surface morphology and chip profile.Corresponding numerical simulations with the analysis of built stress further validate experimental results and reveal the mechanisms governing the material anisotropy influence.The above findings provide insight into the fabrication of ultra-smooth surfaces of polycrystalline metals by ultraprecision diamond turning. | Zhanfeng Wan Junjie Zhang Guo Li Zongwei Xu Haijun Zhang Jianguo Zhang Alexander Hartmaier Fengzhou Fang Yongda Yan Tao Sun | 2020 | Nanomanufacturing and Metrology2020，3，2： | 2 |
| 14 | Crystallographic orientation effect on cutting-based single atomic layer removal显示文摘The ever-increasing requirements for the scalable manufacturing of atomic-scale devices emphasize the significance of developing atomic-scale manufacturing technology. The mechanism of a single atomic layer removal in cutting is the key basic theoretical foundation for atomic-scale mechanical cutting. Material anisotropy is among the key decisive factors that could not be neglected in cutting at such a scale. In the present study, the crystallographic orientation effect on the cutting-based single atomic layer removal of monocrystalline copper is investigated by molecular dynamics simulation. When undeformed chip thickness is in the atomic scale, two kinds of single atomic layer removal mechanisms exist in cutting-based single atomic layer removal, namely, dislocation motion and extrusion, due to the differing atomic structures on different crystallographic planes. On close-packed crystallographic plane, the material removal is dominated by the shear stress-driven dislocation motion, whereas on non-close packed crystallographic planes, extrusion-dominated material removal dominates. To obtain an atomic, defect-free processed surface, the cutting needs to be conducted on the close-packed crystallographic planes of monocrystalline copper. | Wenkun XIE Fengzhou FANG | 2020 | Frontiers of Mechanical Engineering2020，15，4： | 1 |
| 15 | Nanoindentation-induced phase transformation and structural deformation of monocrystalline germanium:a molecular dynamics simulation investigation 显示文摘 | Lai Min Zhang Xiaodong Fang Fengzhou | 2013 | Nanoscale Research Letters2013，8，1： | 1 |
| 16 | Electron paramagnetic resonance characterization of aluminum ion implantation-induced defects in 4H-SiC显示文摘Deep-level defects in silicon carbide(SiC)are critical to the control of the performance of SiC electron devices.In this paper,deep-level defects in aluminumion-implanted 4H-SiC after high-temperature annealingwere studied using electron paramagnetic resonance(EPR)spectroscopy at temperatures of 77 K and 123 K under different illumination conditions.Results showed that the main defect in aluminum ion-implanted 4H-SiC was the positively charged carbon vacancy(VC+),and the higher the doping concentration was,the higher was the concentration of VC+.Itwas found that the type of material defectwas independent of the doping concentration,although more VC+defects were detected during photoexcitation and at lower temperatures.These results should be helpful in the fundamental research of p-type 4H-SiC fabrication in accordance with functional device development. | Xiuhong Wang Zongwei Xua Mathias Rommel Bing Dong Le Song Clarence Augustine TH Tee Fengzhou Fang | 2019 | Nanotechnology and Precision Engineering2019，2，4： | 1 |
| 17 | Orientation effect of electropolishing characteristics of 316L stainless steel fabricated by laser powder bed fusion显示文摘3D metal printing process has attracted increasing attention in recent years due to advantages,such as flexibility and rapid prototyping.This study aims to investigate the orientation effect of electropolishing characteristics on different surfaces of 316L stainless steel fabricated by laser powder bed fusion(L-PBF),considering that the rough surface of 3D printed parts is a key factor limiting its applications in the industry.The electropolishing characteristics on the different surfaces corresponding to the building orientation in selective laser melting are studied.Experimental results show that electrolyte temperature has critical importance on the electropolishing,especially for the vertical direction to the layering plane.The finish of electropolished surfaces is affected by the defects generated during L-PBF process.Thus,the electropolished vertical surface has higher surface roughness Sa than the horizontal surface.The X-ray photoelectron spectroscopy spectra show that the electropolished horizontal surface has higher Cr/Fe element ratio than the vertical surface.The electropolished horizontal surface presents higher corrosion resistance than the vertical surface by measuring the anodic polarization curves and fitting the equivalent circuit of experimental electrochemical impedance spectroscopy. | Wei HAN Fengzhou FANG | 2021 | Frontiers of Mechanical Engineering2021，16，3： | 1 |
| 18 | Decreaseof FIB-induced lateral damage for diamond tool used in nano cutting 显示文摘 | WU Wei XU Zongwei FANG Fengzhou | 2014 | Nuclear Instruments and Methods in Physics Research B2014，330，4： | 1 |
| 19 | Investigation of a plasma delivery system for optical figuring process显示文摘Plasma figuring process enables the correction of metre-scale optical surfaces,which has advantages such as rapid convergence to ultra-precision accuracy level,no subsurface damage,ease of upscale thanks to the conditions of operation at atmospheric.Such attributes make plasma figuring a highly competitive technology.To maintain a stable discharge of plasma for long period,a robust Plasma Delivery System(PDS)is required for large optics manufacturing.A dedicated PDS,mainly based on an L-type radio frequency(RF)network and an inductively coupled plasma(ICP)torch,had been previously proposed and designed.This study addresses the requirement for improving the robustness and securing the performance of the plasma etching.Due to the complexity of interactions of PDS parameters,single variable optimization is conducted for adjusting the impedance of the plasma torch.The PDS optimization is analysed based on ignition power demand,test repeatability and reflected power values.The results show that reflected power values are controllable within 10 W,when the RF power is supplied from 200 W up to 800 W.Finally,plasma processing is carried out on fused silica glass,using the optimum parameters of the PDS. | Nan YU Renaud JOURDAIN Marco CASTELLI Adam BENNETT Jiang GUO Chengyu MA Fengzhou FANG | 2021 | Chinese Journal of Aeronautics2021，34，4： | 1 |
| 20 | Cylindrical coordinate machining of optical freeform surfaces显示文摘 | FANG Fengzhou ZHANG Xiaodong HU Xiaotang | 2008 | Optics Express2008，16，10： | 1 |
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