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41篇 您的检索式：作者名="Enoksson P"

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	题名	作者	年代	出处	被引量
1	Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors 显示文摘	Kunz K Enoksson P Stemme G	2001	Sensors and Actuators A2001，92，：	1
2	A high- stroke, high-pressure electrostatic actuator for valve applica- tions 显示文摘	van der Wijngaart W Ask H Enoksson P	2002	Sensors and Actuators A : Physical2002，100，23：	1
3	Low-tempera- ture full wafer adhesive bonding显示文摘	Niklaus F Enoksson P Kalvesten E	2001	Journal of Microme- chanics and Microengineering2001，11，2：	1
4	Low temperature full wafer adhesive bonding of structure wafer显示文摘	Niklaus F Andersson H Enoksson P	2001	Sensors and Actuators A2001，92，：	1
5	Macromachined flat-walled valveless diffuser pumps 显示文摘	Olsson A Enoksson P Stemme G	1997	Journal of Microelectromechanical Systems1997，6，2：	1
6	A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using 'burst' technology显示文摘	MELIN J ENOKSSON P CORMAN T	2000	Journal of Micromechanics and Microengineering2000，10，2：	1
7	' Burst' technology witht feedback-loop control Ibr calmcitive detection and electrostalic excitation of resonant silicon sensors 显示文摘	Connan T North K Enoksson P	2000	1EEE Transactions on Electron Devices2000，47，11：	1
8	An easy-to-implement method for evaluation of capacitive resonant sensors显示文摘	Ghavanini F A ROdjegard tl Enoksson P	2006	J Micromech Microeng2006，16，：	1
9	Low _ temperaturefull wafer adhesive bonding of structured wafers 显示文摘	NIKLAUS F ERSSON H ENOKSSON P	2001	Actua-tors A2001，92，7：	1
10	Dynamic simulation model for vibraring fluid density sensor 显示文摘	VEIJOLA T CORMAN T ENOKSSON P	1999	Sensors and Actuators1999，76，：	1
11	Overexpression of glutaredoxin 2 attenuates apoptosis by preventing cytochrome release显示文摘	Enoksson M Fernandes A P Prast S		0，，03：	1
12	Micromachined flatwalled valve-less diffuser pumps显示文摘	Enoksson P Stemme G	1997	Microelectromech Syst1997，，6：	1
13	Vibration modes of a resonant silicon tube density sensor 显示文摘	ENOKSSON P STEMME G STEMME E	1996	Journal of Microelectromechanical Systems1996，5，1：	1
14	An easy- to-implement method for evaluation of capacitive reso- nant sensors 显示文摘	Ghavanini F A Rodjegard H Enoksson P	2006	Journal of Micromechanics and Mieroengineering2006，16，：	1
15	A valve-less planar pump isotropically etched in silicon显示文摘	Enoksson P Stemme G	1996	Journal of Micromechanics and Microenginecring1996，6，：	1
16	Wet etching of borosilicate glass using an anodically bonded silicon sub- strate as mask 显示文摘	Cormany T Enoksson P StemmeDeep G	1998	J Micromech Microeng1998，8，：	1
17	Mieromachined flat-walled valve-less diffuser pumps显示文摘	Enoksson P Stemme G	1997	Journal of Micromechanics and Microengineering1997，6，：	1
18	A low-pressure en-capsulated deep reactive ion etched resonant pressure e lectrically excited and detected using' burst 'technology显示文摘	Mehn J Enoksson P Corman T	2000	Journal of Micromechanics and Microengineering2000，10，：	1
19	Micromachined flat-walled valveless diffuser pumps显示文摘	OLSSON A ENOKSSON P STEMME G	1997	Journal of Micromechanics and Microengineering1997，6，：	1
20	Microma- chined electrodes for biopotential measurements 显示文摘	Griss P Enoksson P Tolvanen-Laakso HK	2001	Journal of Mieroelectro- mechanical Systems2001，10，1：	1

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