| 1 | A low noise interface circuit design of micro-machined gyroscope显示文摘The analyses of MEMS gyroscope interface circuit on thermal noise, 1/f noise and phase noise are made in this paper. A closed-loop differential driving circuit and a low-noise differential detecting circuit based on the high frequency modulation are designed to limit the noise. The interface chip is implemented in a standard0.5 μm CMOS process. The test results show that the resolution of sensitive capacity can reach to 6.47×10^(-20) F at the bandwidth of 60 Hz. The measuring range is ± 200°/s and the nonlinearity is 310 ppm. The output noise density is 5.8°/(h·(Hz)^(1/2)). The angular random walk(allen-variance) is 0.092°/h^(1/2) and the bias instability is 2.63°/h. | Qiang Fu Xipeng Di Liang Yin Xiaowei Liu | 2017 | Journal of Semiconductors2017，38，7： | 1 |
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