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46篇 您的检索式：作者名="MAEX K"

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	题名	作者	年代	出处	被引量
1	Composite poly mercore silicashell abrasive particles daring oxide CMP 显示文摘	Armini S Whelan C M Maex K	2007	Journal of the electrochemical society2007，154，8：	1
2	显示文摘	Shamiryan D Baklanov M R Maex K	2003	J Vac Sci Technol B2003，21，：	1
3	Silicides for integrated circuits:TiSi2 and CoSi2显示文摘	MAEX K	1993	Materials Science and Engineering1993，11，23：	1
4	Engineering polymer core - silica size in composite abrasives for CMP applications 显示文摘	S Armioi C M Whelan K Maex	2008	Electrochemical and Solid - State Letters2008，11，10：	1
5	Low dielectric constant materials for microeleetronics显示文摘		2003	J Appl Phys2003，93，：	1
6	Composite polymer coresilica shell abrasives: The effect of polishing time and slurry solid content on oxide CMP显示文摘	ARMINI S WHELAN C M MOINPOUR M MAEX K	2007	Electrochemical and Solid-State Letters2007，10，9：	1
7	Engineering polymer core-silica shell size in the composite abrasives for CMP applications 显示文摘	Armini S Whelan C M Maex K	2008	Electrochemical and solid-state letters2008，11，10：	1
8	Tunnel field-effect transistor without gate-drain overlap 显示文摘	VERHULST A S VANDENBERGHE W G MAEX K	2007	Applied Physics Letters2007，91，5：	1
9	Composite polymer core-silica shell abrasives: The effect of the shape of the silica particles on oxide CMP显示文摘	ARMINI S WHELAN C M MOINPOUR M MAEX K	2008	Journal of the Electrochemical Society2008，155，6：	1
10	Influence of surface and grain-boundary scattering on the resistivity of copper in reduced dimensions显示文摘	WU W BRONGERSMA S H HOVE M V MAEX K	2004	Appl Phys Lett2004，84，15：	1
11	Composite polymer eore-ceria shell abrasive particles during oxide CMP: A defectivity study显示文摘	ARMINI S de MESSEMAEKER J WHELAN C M MOINPOUR M MAEX K	2008	Journal of the Electrochemical Society2008，155，9：	1
12	Engineering polymer core-silica size in composite abrasives for CMP applications显示文摘	ARMINI S WHELAN C M MAEX K	2008	Electrochemical and Solid-State Letters2008，11，10：	1
13	Low dielectric constant materials for microelectronics显示文摘	MAEX K BAKLANOV M R SHAMIRYAN D	2003	Journal of Applied physics2003，93，11：	1
14	Read stability and writeability analysis of SRAM ceils for nanometer technologies显示文摘	Grossar E Stucchi M Maex K	2006	IEEE Journal of Solid-state Circuit2006，41，11：	1
15	Composite polymer core-ceria shell abrasive particles during oxide CMP: A defectivity study显示文摘	ARIMIN1 S de MESSEMAEKER J WHELAN C M MOINPOUR M MAEX K	2008	Journal of the Electrochemical Society2008，155，9：	1
16	Low dielectric constant materials for microelectronics显示文摘	Maex K Baklanov M R Shamiryan D 	2003	Journal of Applied Physics2003，93，11：	1
17	Low dielectric constant materials for microelectronics 显示文摘	Maex K Baklanov M R Shamiryan D	2003	J Appl Phys2003，93，：	1
18	Composite polymer core-silica shell abrasives: The effect of polishing time and slurry solid content on oxide CMP显示文摘	ARM1NI S WHELAN C M MOINPOUR M MAEX K	2007	Electrochemical and Solid-State Letters2007，10，9：	1
19	Composite polymer core-silica shell abrasives: The effect of the shape of the silica particles on oxide CMP显示文摘	ARMINI S WHELAN C M MOINPOUR M MAEX K	2008	Journal of the Electrochemical Society2008，155，6：	1
20	Engineering polymer core-silica size in composite abrasives for CMP applications显示文摘	ARMINI S WHELAN C M MAEX K	2008	Electrochemical and Solid-State Letters2008，11，10：	1

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