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| 1 | Effect of organic amine alkali and inorganic alkali on benzotriazole removal during post Cu-CMP cleaning显示文摘Benzotriazole(BTA), an anticorrosion agent of slurry, is the main organic pollutant remaining after CMP of multilayer copper wiring, and also the main removal object of post CMP cleaning. The adsorption of BTA onto the copper could form a dense Cu-BTA film, which makes the copper surface strongly passivated. According to this characteristic, quantitative analysis of BTA residue after cleaning is carried out by contact angle measurement and electrochemical measurement in this paper. A scanning electron microscope(SEM) with EDX was used to observe and analyze the BTA shape and elements. The efficiencies of organic alkali and inorganic alkali on the removal of BTA were studied. The corresponding reaction mechanism was also analyzed. The results show that the adsorption structure of Cu(I)-BTA cannot be destroyed in an alkaline environment with a pH less than 10; the effect of BTA removal by inorganic alkali is worse than that of the organic amine alkali with the coordination structure under the same pH environment; the FA/O Ⅱ chelating agent with the fraction of 200 ppm can effectively remove BTA residue on the surface of copper wafer. | Liu Yang Baimei Tan Yuling Liu Baohong Gao Yilin Liu Chunyu Han Qi Wang Siyu Tian | 2018 | Journal of Semiconductors2018，39，12： | 6 |
| 2 | Optimization of cleaning process parameters to remove abrasive particles in post-Cu CMP cleaning显示文摘The cleaning of copper interconnect chemical mechanical polishing(CMP) is a key process in integrated circuits(ICs) fabrication. Colloidal silica, which is used as the abrasive material in copper CMP slurry, is considered as the main particle contamination. Abrasive particle residuals can cause device failure which need to be removed efficiently. In this paper, a type of CMP cleaner was used for particle removal using a cleaning solution consisting of FA/O Ⅱ chelating agent and FA/O Ⅰ surfactant. By varying the parameters of brush rotation speed, brush gap,and de-ionized water(DIW) flow rate,a series of experiments were performed to determine the best cleaning results. Atomic force microscope(AFM) measurement was used to characterise the surface morphology of the copper surface and the removal of abrasive particles. A scanning electron microscope(SEM) with EDX was used to observe and analyze the particles shape and elements. The optima parameters of CMP cleaner were obtained. Under those conditions, the abrasive silica particles were removed effectively. | Liu Yang Baimei Tan Yuling Liu Baohong Gao Chunyu Han | 2018 | Journal of Semiconductors2018，39，12： | 2 |
| 3 | 用于实时皮肤创面愈合的超强工程化蛋白凝聚体黏合剂显示文摘Adhesives have attracted a great deal of attention as an advanced modality in biomedical engineering because of their unique wound management behavior.However,it is a grand challenge for current adhesive systems to achieve robust adhesion due to their tenuous interfacial bonding strength.Moreover,the absence of dynamic adaptability in conventional chemical adhesives restricts neoblasts around the wound from migrating to the site,resulting in an inferior tissue-regeneration effect.Herein,an extracellular matrix-derived biocomposite adhesive with robust adhesion and a real-time skin healing effect is well-engineered.Liquid–liquid phase separation is well-harnessed to drive the assembly of the biocomposite adhesive,with the active involvement of supramolecular interactions between chimeric protein and natural DNA,leading to a robustly reinforced adhesion performance.The bioadhesive exhibits outstanding adhesion and sealing behaviors,with a sheared adhesion strength of approximately 18 MPa,outperforming its reported counterparts.Moreover,the engineered bioderived components endow this adhesive material with biocompatibility and exceptional biological functions including the promotion of cell proliferation and migration,such that the use of this material eventually yields real-time in situ skin regeneration.This work opens up novel avenues for functionalized bioadhesive engineering and biomedical translations. | Ming Li Baimei Liu Wei Xu Lai Zhao Zili Wang Haonan He Jingjing Li Fan Wang Chao Ma Kai Liu Hongjie Zhang | 2023 | Engineering2023，31，12： | 0 |
| 4 | An Electrochemical Cleaning Technique for Removal of Surface Contamination before Texturization of Silicon Solar Cells显示文摘In order to decrease the consumption of reagents and silicon during removal of surface contamination before silicon texturing in solar cell manufacturing industry, a new low-cost surface treatment approach of electrochemical cleaning technique(ECT) is reported. In this technique, a powerful oxidizing electrolyte was obtained from the electrochemical reaction on Boron-doped Diamond(BDD) electrodes, and applied during removal of surface contaminations on silicon wafer surfaces. The slightly polished monocrystalline silicon surfaces after cleaning were compared with the ones of primal silicon wafers. The measurement results show that ECT is quite efficient in removing NaCl and organic contaminants. After cleaning, the contrast test was conducted for the textured silicon wafers with/without pre-treatment(polish) separately. The results show that the size of pyramids on the surface without traditional polishing process is homogeneous and smaller than 4μm, and the average surface reflectance is much lower in the wavelength range from 400nm to 800nm. Therefore, the new technique can save silicon material, and effectively avoid optical losses for improving photoconversion effect of solar cells. | ZHANG Jianxin LIU Yuling TAN Baimei NIU Xinhuan GAO Baohong | 2010 | Semiconductor Photonics and Technology2010，16，1： | 0 |
| 5 | Circumferential variation in mechanical characteristics of porcine descending aorta显示文摘Arterial characterization of healthy descending thoracic aorta(DTA)is indispensable in determining stress distributions across wall thickness and different regions that may be responsible for aorta inhomogeneous dilation,rupture,and dissection when aneurysm occurs.Few studies have shown the inhomogeneity of DTA along the aorta tree considering changes in circumferential direction.The present study aims to clarify the circumferential regional characterization of DTA.Porcine DTA tissues were tested according to region and orientation using uniaxial tension.For axial test,results show that the difference in circumferential direction was mainly in collagen fiber modulus,where the anterior collagen fiber modulus was significantly lower than the posterior quadrant.For circumferential test,the difference in circumferential direction was mainly in the recruitment parameter,where the circumferential stiffness is significantly higher in the posterior region at physiological maximum stress.The proximal posterior quadrant and left quadrant showed significantly lower axial collagen fiber stiffness than the right and anterior quadrants,which may be a factor in aneurysm development.Furthermore,the constitutive parameters for similar detailed regions can be used by biomedical engineers to investigate improved therapies and thoroughly understand the initial stage of aneurysm development.The regional collagen fiber modulus can help improve our understanding of the mechanisms of arterial dilation and aortic dissection. | LINGFENG CHEN ZHIPENG GAO BAIMEI LIU YING LV MEIWEN AN JILING FENG | 2018 | BIOCELL2018，42，1： | 0 |
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