Synthesis of ordered Si nanowire arrays in porous anodic aluminum oxide templates

查看全文 作　　者：Mengke [1]Li;Chengwei [1]Wang;Hulin [1]Li

机构地区：[1]Lanzhou Univ, Dept Chem, Lanzhou 730000, Peoples R China

出　　处：《Chinese Science Bulletin》索引2001年第46卷第21期,共4页

基　　金：This work was supported by the National Natural Science Foundation of China (Grant Nos. 69890220 and 69871013). 摘　　要：Highly ordered poly crystalline Si nanowire arrays were synthesized in porous anodic aluminum oxide (AAO) templates by the chemical vapor deposition (CVD) method. The morphological structure, the crystal character of Si nanowire arrays and the individual nanowire were analyzed by the transmission electron microscopy (TEM), scanning electron microscopy (SEM), atom force microscopy (AFM) and the X-ray diffraction spectrum (XRD), respectively. It is shown that most fabricated silicon nanowires (SiNWs) tend to be assembled parallelly in bundles and constructed with highly orientated arrays. This method provides a simple and low cost fabricating craftwork and the diameters and lengths of SiNWs can be controlled, the large area Si nanowire arrays can be achieved easily under such a way. The curling and twisting SiNWs are fewer than those by other synthesis methods. 关键词：Si NANOWIRE ARRAYS chemical vapor DEPOSITION POROUS anodic aluminum oxide template.

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Synthesis of ordered Si nanowire arrays in porous anodic aluminum oxide templates

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